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dc.contributor.authorJin, Yen
dc.contributor.authorMoreno, Men
dc.contributor.authorT. Vianez, PMen
dc.contributor.authorTan, WKen
dc.contributor.authorGriffiths, JPen
dc.contributor.authorFarrer, Ien
dc.contributor.authorRitchie, Daviden
dc.contributor.authorFord, Christopheren
dc.date.accessioned2021-04-08T23:30:23Z
dc.date.available2021-04-08T23:30:23Z
dc.date.issued2021-04-19en
dc.identifier.issn0003-6951
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/319610
dc.description.abstractWe present a single-exposure fabrication technique for a very large array of microscopic air-bridges using a tri-layer resist process with electron-beam lithography. The technique is capable of forming air-bridges with strong metal-metal or metal-substrate connections. This was demonstrated by its application in an electron tunnelling device consisting of 400 identical surface gates for defining quantum wires, where the air-bridges are used as suspended connections for the surface gates. This technique enables us to create a large array of uniform one-dimensional channels that are open at both ends. In this article, we outline the details of the fabrication process, together with a study and the solution of the challenges present in the development of the technique, which includes the use of water-IPA (isopropyl alcohol) developer, calibration of resist thickness and numerical simulation of the development.
dc.publisherAmerican Institute of Physics
dc.rightsAll rights reserved
dc.rights.uri
dc.titleMicroscopic metallic air-bridge arrays for connecting quantum devicesen
dc.typeArticle
prism.issueIdentifier16en
prism.publicationDate2021en
prism.publicationNameApplied Physics Lettersen
prism.volume118en
dc.identifier.doi10.17863/CAM.66730
dcterms.dateAccepted2021-03-22en
rioxxterms.versionofrecord10.1063/5.0045557en
rioxxterms.versionAM
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserveden
rioxxterms.licenseref.startdate2021-04-19en
dc.contributor.orcidT. Vianez, PM [0000-0003-2245-6108]
dc.contributor.orcidGriffiths, JP [0000-0002-6933-7707]
dc.contributor.orcidFarrer, I [0000-0002-3033-4306]
dc.contributor.orcidRitchie, David [0000-0002-9844-8350]
dc.contributor.orcidFord, Christopher [0000-0002-4557-3721]
dc.identifier.eissn1077-3118
rioxxterms.typeJournal Article/Reviewen
pubs.funder-project-idUNIVERSITY COLLEGE LONDON (FB EPSRC) (EP/K004077/1)
pubs.funder-project-idEPSRC (EP/J01690X/1)
pubs.funder-project-idEPSRC (EP/J003417/1)
pubs.funder-project-idEPSRC (1948695)
pubs.funder-project-idEPSRC (EP/N509620/1)
datacite.issupplementedby.urlhttps://doi.org/10.17863/CAM.66595
cam.orpheus.successMon Apr 26 07:30:35 BST 2021 - Embargo updated*
cam.orpheus.counter2*
rioxxterms.freetoread.startdate2021-04-19


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