A Mems Vibrating Beam Accelerometer for High Resolution Seismometry and Gravimetry
Accepted version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Description
Keywords
Micromechanical devices, resonators, thermal stability, frequency stability, sensors
Journal Title
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Conference Name
2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS)
Journal ISSN
1084-6999
Volume Title
2021-January
Publisher
IEEE
Publisher DOI
Rights
All rights reserved
Sponsorship
Technology Strategy Board (920035)