A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability
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Peer-reviewed
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Abstract
This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µLHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*10^6 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.
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Keywords
MEMS oscillators, bulk mode resonators, frequency stability
Journal Title
21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021
Conference Name
2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)
Journal ISSN
2167-0013
2167-0021
2167-0021
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Publisher
IEEE
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All rights reserved
Sponsorship
Engineering and Physical Sciences Research Council (EP/P013848/1)
Engineering and Physical Research Council UK, Silicon Microgravity and Innovate UK.