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A Silicon MEMS Disk Resonator Oscillator Demonstrating 36 ppt Frequency Stability

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Sobreviela, G 
Zhang, H 
Seshia, AA 

Abstract

This paper reports experimental results demonstrating excellent short-term frequency stability of 45.6 µLHz (36 ppt@0.4 s integration time) for a bulk acoustic wave (BAW) silicon disk resonator oscillator. The n=4 radial mode of a BAW disk resonator demonstrates an extremely high-quality factor of 1.8*10^6 at 1.25 MHz. The disk is designed with anchors aligned with nodal locations to minimize anchor damping. The results on the measured short-term frequency stability reported here benchmark favourably relative to the state-of-the-art.

Description

Keywords

MEMS oscillators, bulk mode resonators, frequency stability

Journal Title

21st International Conference on Solid-State Sensors, Actuators and Microsystems, TRANSDUCERS 2021

Conference Name

2021 21st International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers)

Journal ISSN

2167-0013
2167-0021

Volume Title

Publisher

IEEE

Rights

All rights reserved
Sponsorship
Engineering and Physical Sciences Research Council (EP/P013848/1)
Engineering and Physical Research Council UK, Silicon Microgravity and Innovate UK.