Electrostatic Frequency Tuning of Bulk Acoustic Wave Disk Gyroscopes
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Peer-reviewed
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Abstract
Bulk acoustic wave gyroscopes have been researched for potential benefits such as immunity to shock and vibration and the high Q factors achievable with the bulk modes. This paper outlines an approach to address mode matching in bulk acoustic wave (BAW) disk gyroscopes using electrostatic frequency tuning. Electrostatic frequency tuning is achieved by varying the potential difference between the body of the resonator and electrodes surrounding the disk resonator. Tuning of the frequencies of both drive and sense modes is demonstrated in this work as a means to achieving mode matching. The experimental results are also compared to COMSOL simulations reporting mode matching.
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Keywords
MEMS, Gyroscopes, bulk acoustic wave sensors, mode matching
Journal Title
IFCS-ISAF 2020 - Joint Conference of the IEEE International Frequency Control Symposium and IEEE International Symposium on Applications of Ferroelectrics, Proceedings
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2020 Joint Conference of the IEEE International Frequency Control Symposium and International Symposium on Applications of Ferroelectrics (IFCS-ISAF)
Journal ISSN
1099-4734
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IEEE
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