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dc.contributor.authorPopa, Daniel
dc.contributor.authorHopper, Richard
dc.contributor.authorAli, Syed Zeeshan
dc.contributor.authorCole, Matthew
dc.contributor.authorFan, Ye
dc.contributor.authorVeigang-Radulescu, Vlad-Petru
dc.contributor.authorChikkaraddy, Rohit
dc.contributor.authorNallala, Jayakrupakar
dc.contributor.authorXing, Yuxin
dc.contributor.authorAlexander-Webber, Jack
dc.contributor.authorHofmann, Stephan
dc.contributor.authorDe Luca, Andrea
dc.contributor.authorGardner, Julian William
dc.contributor.authorUdrea, Florin
dc.date.accessioned2021-12-15T10:06:54Z
dc.date.available2021-12-15T10:06:54Z
dc.date.issued2021-11-25
dc.date.submitted2021-08-01
dc.identifier.issn2045-2322
dc.identifier.others41598-021-02121-5
dc.identifier.other2121
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/331424
dc.descriptionFunder: National Physical Laboratory; doi: http://dx.doi.org/10.13039/501100007851
dc.descriptionFunder: Royal Society Dorothy Hodgkin Research Fellowship
dc.description.abstractThe gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (>700 ∘C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 ∘C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Things.
dc.languageen
dc.publisherNature Publishing Group
dc.subjectArticle
dc.subject/704/172/4081
dc.subject/692/700/784
dc.subject/639/166/987
dc.subject/639/301/1005/1009
dc.subject/639/301/357/73
dc.subject/639/301/930/527/2257
dc.subjectarticle
dc.titleA highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing
dc.typeArticle
dc.date.updated2021-12-15T10:06:53Z
prism.issueIdentifier1
prism.publicationNameScientific Reports
prism.volume11
dc.identifier.doi10.17863/CAM.78878
dcterms.dateAccepted2021-11-03
rioxxterms.versionofrecord10.1038/s41598-021-02121-5
rioxxterms.versionVoR
rioxxterms.licenseref.urihttp://creativecommons.org/licenses/by/4.0/
dc.contributor.orcidPopa, Daniel [0000-0002-5708-743X]
dc.contributor.orcidHopper, Richard [0000-0003-1863-9008]
dc.contributor.orcidFan, Ye [0000-0003-0998-5881]
dc.contributor.orcidChikkaraddy, Rohit [0000-0002-3840-4188]
dc.contributor.orcidAlexander-Webber, Jack [0000-0002-9374-7423]
dc.contributor.orcidHofmann, Stephan [0000-0001-6375-1459]
dc.contributor.orcidUdrea, Florin [0000-0002-7288-3370]
dc.identifier.eissn2045-2322
pubs.funder-project-idRoyal Society (DHF\F1\191163)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/P005152/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/M508007/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/S031847/1)
cam.issuedOnline2021-11-25


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