Modelling of CMOS Single Membrane Thermopile Detector Arrays
View / Open Files
Authors
Dai, Y
Ali, SZ
Hopper, R
Popa, D
Udrea, F
Publication Date
2022Journal Title
IEEE Sensors Journal
ISSN
1530-437X
Publisher
Institute of Electrical and Electronics Engineers
Volume
PP
Issue
99
Pages
1-1
Type
Article
This Version
AM
Metadata
Show full item recordCitation
Dai, Y., Ali, S., Hopper, R., Popa, D., & Udrea, F. (2022). Modelling of CMOS Single Membrane Thermopile Detector Arrays. IEEE Sensors Journal, PP (99), 1-1. https://doi.org/10.1109/JSEN.2021.3132949
Abstract
We propose a numerical model for efficient design and optimization of a novel infrared (IR) detector array, fabricated on a single micro-electro-mechanical system (MEMS) membrane based on silicon on insulator (SOI) technology. The model is based on a finite element method (FEM) and is used to investigate the effect of heat transfer, at pixel scale, on the thermopile array’s responsivity and crosstalk performance. We show that optimal operational conditions can be achieved by modifying a combination of design elements, including the pixel size, the interpixel metal heatsinking tracks, as well as the insertion of air gaps between pixels. We find that the combined effect of copper heatsinking tracks and that of air gaps can reduce pixel crosstalk by 65% while increasing the responsivity by 6.4%. The model improves our understanding of the thermal effects in these devices, and can serve as a design tool for a growing number of low-cost industrial and consumer applications.
Sponsorship
Engineering and Physical Sciences Research Council (EPSRC) under Grant EP/S031847/1
Funder references
Engineering and Physical Sciences Research Council (EP/S031847/1)
Identifiers
External DOI: https://doi.org/10.1109/JSEN.2021.3132949
This record's URL: https://www.repository.cam.ac.uk/handle/1810/332783
Statistics
Total file downloads (since January 2020). For more information on metrics see the
IRUS guide.
Recommended or similar items
The current recommendation prototype on the Apollo Repository will be turned off on 03 February 2023. Although the pilot has been fruitful for both parties, the service provider IKVA is focusing on horizon scanning products and so the recommender service can no longer be supported. We recognise the importance of recommender services in supporting research discovery and are evaluating offerings from other service providers. If you would like to offer feedback on this decision please contact us on: support@repository.cam.ac.uk