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Miniaturized thermal acoustic gas sensor based on a CMOS microhotplate and MEMS microphone.

Published version
Peer-reviewed

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Authors

Udrea, Florin 
Ali, Syed Zeeshan 
Stanley-Marbell, Phillip  ORCID logo  https://orcid.org/0000-0001-7752-2083

Abstract

We present a miniaturised thermal acoustic gas sensor, fabricated using a CMOS microhotplate and MEMS microphone. The sensing mechanism is based on the detection of changes in the thermal acoustic conversion efficiency which is dependent on the physical properties of the gas. An active sensing element, consisting of a MEMS microphone, is used to detect the target gas while a reference element is used for acoustic noise compensation. Compared to current photoacoustic gas sensors, our sensor requires neither the use of gas-encapsulated microphones, nor that of optical filters. In addition, it has all the benefits of CMOS technology, including production scalability, low cost and miniaturization. Here we demonstrate its application for CO[Formula: see text] gas detection. The sensor could be used for gas leak detection, for example, in an industrial plant.

Description

Keywords

4605 Data Management and Data Science, 46 Information and Computing Sciences, 40 Engineering, 4009 Electronics, Sensors and Digital Hardware

Journal Title

Sci Rep

Conference Name

Journal ISSN

2045-2322
2045-2322

Volume Title

12

Publisher

Springer Science and Business Media LLC
Sponsorship
Engineering and Physical Sciences Research Council (EP/R022534/1)
Engineering and Physical Sciences Research Council (EP/S031847/1)
EPSRC (via University of Sheffield) (EP/V061798/1)
We acknowledge funding from EPSRC grants EP/S031847/1, EP/R022534/1, Alan Turing Institute Award TU/B/ 000096 under EPSRC Grant EP/N510129/1, and Royal Society Equipment Grant RG170136.