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dc.contributor.authorMilana, Edoardo
dc.contributor.authorBenjamin, Gorissen
dc.contributor.authorDe Borre, Eline
dc.contributor.authorCeyssens, Frederik
dc.contributor.authorReynaerts, Dominiek
dc.contributor.authorDe Volder, Michael
dc.date.accessioned2022-03-28T23:31:13Z
dc.date.available2022-03-28T23:31:13Z
dc.identifier.issn2169-5172
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/335464
dc.description.abstractElastic pneumatic actuators are fuelling new devices and applications in soft robotics. Actuator miniaturisation is critical to enable soft microsystems for applications in microfluidics and micromanipulation. This work proposes a fabrication technique to make out-of-plane bending microactuators entirely by soft lithography. The only bonding step required is to seal the embedded fluidic channels, assuring the structural integrity of the microactuators. The process consists of fabricating two SU8 mold halves using different lithographic layers. Polydimethilsiloxane (PDMS) is poured on the bottom mold, which is subsequently aligned and assembled with the top mould. The process allows for out-of-plane actuators with a diameter of 300 µm and for fabricating arrays of up to 36 actuators that are row-addressable. These active micropillars have an aspect ratio of 1:1.5 and when pressurized at 1 bar, show a bending angle of approximately 30°.
dc.description.sponsorshipFWO - Belgium
dc.publisherMary Ann Liebert
dc.rightsAll Rights Reserved
dc.rights.urihttp://www.rioxx.net/licenses/all-rights-reserved
dc.titleOut-of-Plane Soft Lithography for Soft Pneumatic Microactuators Arrays
dc.typeArticle
dc.publisher.departmentDepartment of Engineering
dc.date.updated2022-03-28T10:58:49Z
prism.publicationNameSoft Robotics
dc.identifier.doi10.17863/CAM.82893
dcterms.dateAccepted2022-03-25
rioxxterms.versionAM
dc.contributor.orcidDe Volder, Michael [0000-0003-1955-2270]
rioxxterms.typeJournal Article/Review
cam.orpheus.counter7*
cam.depositDate2022-03-28
pubs.licence-identifierapollo-deposit-licence-2-1
pubs.licence-display-nameApollo Repository Deposit Licence Agreement
rioxxterms.freetoread.startdate2025-03-28


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