Ultra-fine Particulate Detection using Mode-localized MEMS Resonators
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Authors
Chellasivalingam, M
Pandit, M
Kalberer, M
Seshia, AA
Publication Date
2019Journal Title
IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
Conference Name
2019 Joint Conference of the IEEE International Frequency Control Symposium anEuropean Frequency and Time Forum (EFTF/IFC)
ISSN
2327-1914
ISBN
9781538683057
Publisher
IEEE
Volume
00
Pages
1-5
Type
Conference Object
This Version
AM
Metadata
Show full item recordCitation
Chellasivalingam, M., Pandit, M., Kalberer, M., & Seshia, A. (2019). Ultra-fine Particulate Detection using Mode-localized MEMS Resonators. IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings, 00 1-5. https://doi.org/10.1109/FCS.2019.8856014
Abstract
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS resonators for ultra-fine particulate detection applications. The potential benefits of this approach include higher parametric sensitivity and intrinsic common mode rejection as compared to the resonant frequency shift-based detection approach. Weakly coupled MEMS resonators demonstrated in this paper demonstrate sensitivity to fine particulates and a significant improvement in mass sensitivity for particulate quantification by employing an amplitude ratio shift output metric.
Sponsorship
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)
Identifiers
External DOI: https://doi.org/10.1109/FCS.2019.8856014
This record's URL: https://www.repository.cam.ac.uk/handle/1810/336623
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