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Ultra-fine Particulate Detection using Mode-localized MEMS Resonators

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Chellasivalingam, M 
Pandit, M 
Seshia, AA 

Abstract

This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS resonators for ultra-fine particulate detection applications. The potential benefits of this approach include higher parametric sensitivity and intrinsic common mode rejection as compared to the resonant frequency shift-based detection approach. Weakly coupled MEMS resonators demonstrated in this paper demonstrate sensitivity to fine particulates and a significant improvement in mass sensitivity for particulate quantification by employing an amplitude ratio shift output metric.

Description

Keywords

ultra-fine particulate matter, mode localization, amplitude ratio, coupled MEMS resonators, mass sensor, Lame mode, piezoelectric bulk acoustic resonators

Journal Title

IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings

Conference Name

2019 Joint Conference of the IEEE International Frequency Control Symposium anEuropean Frequency and Time Forum (EFTF/IFC)

Journal ISSN

2327-1914

Volume Title

00

Publisher

IEEE
Sponsorship
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)