Ultra-fine Particulate Detection using Mode-localized MEMS Resonators
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Peer-reviewed
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Abstract
This paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS resonators for ultra-fine particulate detection applications. The potential benefits of this approach include higher parametric sensitivity and intrinsic common mode rejection as compared to the resonant frequency shift-based detection approach. Weakly coupled MEMS resonators demonstrated in this paper demonstrate sensitivity to fine particulates and a significant improvement in mass sensitivity for particulate quantification by employing an amplitude ratio shift output metric.
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Keywords
ultra-fine particulate matter, mode localization, amplitude ratio, coupled MEMS resonators, mass sensor, Lame mode, piezoelectric bulk acoustic resonators
Journal Title
IFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
Conference Name
2019 Joint Conference of the IEEE International Frequency Control Symposium anEuropean Frequency and Time Forum (EFTF/IFC)
Journal ISSN
2327-1914
Volume Title
00
Publisher
IEEE
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Sponsorship
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)