Show simple item record

dc.contributor.authorChellasivalingam, Malar
dc.contributor.authorPandit, M
dc.contributor.authorKalberer, Markus
dc.contributor.authorSeshia, Ashwin
dc.date.accessioned2022-04-29T23:30:05Z
dc.date.available2022-04-29T23:30:05Z
dc.date.issued2019
dc.identifier.isbn9781538683057
dc.identifier.issn2327-1914
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/336623
dc.description.abstractThis paper demonstrates the feasibility of employing mode localized mass sensing in coupled MEMS resonators for ultra-fine particulate detection applications. The potential benefits of this approach include higher parametric sensitivity and intrinsic common mode rejection as compared to the resonant frequency shift-based detection approach. Weakly coupled MEMS resonators demonstrated in this paper demonstrate sensitivity to fine particulates and a significant improvement in mass sensitivity for particulate quantification by employing an amplitude ratio shift output metric.
dc.publisherIEEE
dc.rightsAll Rights Reserved
dc.rights.urihttp://www.rioxx.net/licenses/all-rights-reserved
dc.titleUltra-fine Particulate Detection using Mode-localized MEMS Resonators
dc.typeConference Object
dc.publisher.departmentDepartment of Engineering Student
dc.publisher.departmentDepartment of Chemistry
dc.publisher.departmentDepartment of Engineering
dc.date.updated2022-04-23T11:38:39Z
prism.endingPage5
prism.publicationDate2019
prism.publicationNameIFCS/EFTF 2019 - Joint Conference of the IEEE International Frequency Control Symposium and European Frequency and Time Forum, Proceedings
prism.startingPage1
prism.volume00
dc.identifier.doi10.17863/CAM.84044
rioxxterms.versionofrecord10.1109/FCS.2019.8856014
rioxxterms.versionAM
dc.contributor.orcidKalberer, Markus [0000-0001-8885-6556]
dc.contributor.orcidSeshia, Ashwin [0000-0001-9305-6879]
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/I019308/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/K000314/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/L010917/1)
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/N021614/1)
pubs.conference-name2019 Joint Conference of the IEEE International Frequency Control Symposium anEuropean Frequency and Time Forum (EFTF/IFC)
pubs.conference-start-date2019-04-14
cam.orpheus.successWed May 25 11:13:42 BST 2022 - Embargo updated*
cam.depositDate2022-04-23
pubs.conference-finish-date2019-04-18
pubs.licence-identifierapollo-deposit-licence-2-1
pubs.licence-display-nameApollo Repository Deposit Licence Agreement
rioxxterms.freetoread.startdate2100-01-01


Files in this item

Thumbnail

This item appears in the following Collection(s)

Show simple item record