Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing
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Authors
Chellasivalingam, M
Graves, B
Boies, A
Seshia, AA
Publication Date
2020Journal Title
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Conference Name
2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN
1084-6999
ISBN
9781728135809
Publisher
IEEE
Volume
2020-January
Pages
761-764
Type
Conference Object
This Version
AM
Metadata
Show full item recordCitation
Chellasivalingam, M., Graves, B., Boies, A., & Seshia, A. (2020). Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), 2020-January 761-764. https://doi.org/10.1109/MEMS46641.2020.9056426
Abstract
This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS resonator array for ultrafine aerosol particulate sensing. The mass balancing technique enables the lifetime extension of such real-time particulate sensors without employing any wet or dry-cleaning techniques to remove particles from the resonators. This mass balancing is demonstrated for both the flexural and bulk modes of the same coupled resonator array occurring at ∼54kHz and ∼2.53MHz, respectively. This system also demonstrates for a degree of passive environment immunity to temperature effects by using an amplitude ratio output metric. The Q factor of the coupled MEMS resonator system do not degrade substantially with increased particulate loading.
Keywords
mass tuning, mass balancing, sensor lifetime, weak coupling, piezoelectric MEMS, common-mode rejection, cleaning particles, Q factor
Sponsorship
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)
Identifiers
External DOI: https://doi.org/10.1109/MEMS46641.2020.9056426
This record's URL: https://www.repository.cam.ac.uk/handle/1810/336624
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