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Mass Tuning in Weakly Coupled Low-Q Piezoelectric MEMS Resonator Arrays for Particulate Sensing

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Chellasivalingam, M 
Graves, B 
Seshia, AA 

Abstract

This paper reports the achievement of a mass balanced condition in a low-Q weakly coupled MEMS resonator array for ultrafine aerosol particulate sensing. The mass balancing technique enables the lifetime extension of such real-time particulate sensors without employing any wet or dry-cleaning techniques to remove particles from the resonators. This mass balancing is demonstrated for both the flexural and bulk modes of the same coupled resonator array occurring at ∼54kHz and ∼2.53MHz, respectively. This system also demonstrates for a degree of passive environment immunity to temperature effects by using an amplitude ratio output metric. The Q factor of the coupled MEMS resonator system do not degrade substantially with increased particulate loading.

Description

Keywords

mass tuning, mass balancing, sensor lifetime, weak coupling, piezoelectric MEMS, common-mode rejection, cleaning particles, Q factor

Journal Title

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Conference Name

2020 IEEE 33rd International Conference on Micro Electro Mechanical Systems (MEMS)

Journal ISSN

1084-6999

Volume Title

2020-January

Publisher

IEEE
Sponsorship
Engineering and Physical Sciences Research Council (EP/I019308/1)
Engineering and Physical Sciences Research Council (EP/K000314/1)
Engineering and Physical Sciences Research Council (EP/L010917/1)
Engineering and Physical Sciences Research Council (EP/N021614/1)