Bulk Molybdenum Spindt Field Emission Arrays
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Abstract
This paper reports on a simple approach for fabricating modest aspect ratio field emission arrays (FEAs) directly from bulk molybdenum substrates via the use of fluorine inductive-coupled-plasma (ICP) etching. Compared to traditional Spindt array fabrication, through our outlined fabrication process all thin film interfaces have been eliminated reducing tip delamination during operation. The as-fabricated devices exhibited low turn-on electric fields (I = 100nA) of 1.21 V/μm. Arrays of more than 10
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This is the final version of the article. It first appeared from One Central Press via http://www.onecentralpress.com/bulk-molybdenum-spindt-field-emission-arrays/.