Research data supporting "Near-Field Optical Drilling of Sub-λ Pits in Thin Polymer Films"

Name: Research data supporting "Near-Field Optical Drilling of Sub-λ Pits in Thin Polymer Films"
Published: 2017-05-31T11:02:27Z
Keywords: photolithography, diffraction limit, polystyrene, photo-degradation, crevices

Ding, T; Chikkaraddy, R; Mertens, J; baumberg, J

doi:10.17863/CAM.9981

Research data supporting "Near-Field Optical Drilling of Sub-λ Pits in Thin Polymer Films"

Repository URI

https://www.repository.cam.ac.uk/handle/1810/264521

Repository DOI

https://doi.org/10.17863/CAM.9981

Files

dataset.zip (294.81 KB)

fig3.rar (33.97 MB)

Type

Dataset

Authors

Ding, T

Chikkaraddy, Rohit

https://orcid.org/0000-0002-3840-4188

Mertens, J

baumberg, J

Description

see the figure captions in the paper

Software / Usage instructions

origin, notepad

Keywords

photolithography, diffraction limit, polystyrene, photo-degradation, crevices

Rights and licensing

Except where otherwised noted, this item's license is described as Attribution 4.0 International (CC BY 4.0)

Sponsorship

European Research Council (320503)
Engineering and Physical Sciences Research Council (EP/L027151/1)
Leverhulme Trust (ECF-2016-606)

Relationships

Supplements:

https://doi.org/10.1021/acsphotonics.6b01000

Collections

Research Data - Physics
Symplectic mapped items for data match

Research data supporting "Near-Field Optical Drilling of Sub-λ Pits in Thin Polymer Films"

Repository URI

Repository DOI

Files

Type

Change log

Authors

Description

Version

Software / Usage instructions

Keywords

Publisher

Rights and licensing

Sponsorship

Relationships

Collections