Analysis of amorphous indium-gallium-zinc-oxide thin-film transistor contact metal using Pilling-Bedworth theory and a variable capacitance diode model


Type
Article
Change log
Authors
Kiani, A 
Hasko, DG 
Milne, WI 
Flewitt, AJ 
Abstract

jats:pIt is widely reported that threshold voltage and on-state current of amorphous indium-gallium-zinc-oxide bottom-gate thin-film transistors are strongly influenced by the choice of source/drain contact metal. Electrical characterisation of thin-film transistors indicates that the electrical properties depend on the type and thickness of the metal(s) used. Electron transport mechanisms and possibilities for control of the defect state density are discussed. Pilling-Bedworth theory for metal oxidation explains the interaction between contact metal and amorphous indium-gallium-zinc-oxide, which leads to significant trap formation. Charge trapping within these states leads to variable capacitance diode-like behavior and is shown to explain the thin-film transistor operation.</jats:p>

Description
Keywords
aluminium, amorphous semiconductors, capacitance, defect states, gallium compounds, gold, II-VI semiconductors, indium compounds, molybdenum, oxidation, semiconductor-metal boundaries, thin film transistors, tin, titanium, tungsten, wide band gap semiconductors, zinc compounds
Journal Title
Applied Physics Letters
Conference Name
Journal ISSN
0003-6951
1077-3118
Volume Title
102
Publisher
AIP Publishing
Sponsorship
Engineering and Physical Sciences Research Council (TS/I001158/1)
This work was supported by the Engineering and Physical Sciences Research Council