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A highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing

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dc.contributor.authorPopa, Daniel
dc.contributor.authorHopper, Richard
dc.contributor.authorAli, Syed Zeeshan
dc.contributor.authorCole, Matthew
dc.contributor.authorFan, Ye
dc.contributor.authorVeigang-Radulescu, Vlad-Petru
dc.contributor.authorChikkaraddy, Rohit
dc.contributor.authorNallala, Jayakrupakar
dc.contributor.authorXing, Yuxin
dc.contributor.authorAlexander-Webber, Jack Allen
dc.contributor.authorHofmann, Stephan
dc.contributor.authorDe Luca, Andrea
dc.contributor.authorGardner, Julian William
dc.contributor.authorUdrea, Florin
dc.contributor.orcidPopa, Daniel [0000-0002-5708-743X]
dc.contributor.orcidFan, Ye [0000-0003-0998-5881]
dc.contributor.orcidChikkaraddy, Rohit [0000-0002-3840-4188]
dc.contributor.orcidAlexander-Webber, Jack Allen [0000-0002-9374-7423]
dc.contributor.orcidHofmann, Stephan [0000-0001-6375-1459]
dc.contributor.orcidUdrea, Florin [0000-0002-7288-3370]
dc.date.accessioned2021-11-05T00:30:36Z
dc.date.available2021-11-05T00:30:36Z
dc.description.abstract<jats:title>Abstract</jats:title> <jats:p>The gas sensor market is growing fast, driven by many socioeconomic and industrial factors. Mid-infrared (MIR) gas sensors offer excellent performance for an increasing number of sensing applications in healthcare, smart homes, and the automotive sector. Having access to low-cost, miniaturized, energy efficient light sources is of critical importance for the monolithic integration of MIR sensors. Here, we present an on-chip broadband thermal MIR source fabricated by combining a complementary metal oxide semiconductor (CMOS) micro-hotplate with a dielectric-encapsulated carbon nanotube (CNT) blackbody layer. The micro-hotplate was used during fabrication as a micro-reactor to facilitate high temperature (&gt;700 • C) growth of the CNT layer and also for post-growth thermal annealing. We demonstrate, for the first time, stable extended operation in air of devices with a dielectric-encapsulated CNT layer at heater temperatures above 600 • C. The demonstrated devices exhibit almost unitary emissivity across the entire MIR spectrum, offering an ideal solution for low-cost, highly-integrated MIR spectroscopy for the Internet of Sensors.</jats:p>
dc.identifier.doi10.17863/CAM.77749
dc.identifier.issn2045-2322
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/330305
dc.language.isoeng
dc.publisherResearch Square Platform LLC
dc.rightsAttribution 4.0 International
dc.rights.urihttps://creativecommons.org/licenses/by/4.0/
dc.titleA highly stable, nanotube-enhanced, CMOS-MEMS thermal emitter for mid-IR gas sensing
dc.typeArticle
dcterms.dateAccepted2021-11-03
prism.publicationNameScientific Reports
pubs.funder-project-idEngineering and Physical Sciences Research Council (EP/S031847/1)
rioxxterms.licenseref.startdate2021-11-03
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserved
rioxxterms.typeJournal Article/Review
rioxxterms.versionVoR
rioxxterms.versionofrecord10.21203/rs.3.rs-772425/v1

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