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Modelling focused electron beam induced deposition beyond Langmuir adsorption

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Sanz-Hernández, D 
Fernandez-Pacheco, Amalio  ORCID logo


The continuum model of focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion are investigated and compared for a wide range of conditions. The different growth regimes observed are fully explained by relative changes in FEBID characteristic frequencies. Additionally, we present a set of FEBID frequency maps where growth rate and surface coverage are plotted as a function of characteristic timescales. From analyzing Langmuir, as well as homogeneous and heterogeneous multilayer maps, we infer that three types of growth regimes are possible for FEBID under no diffusion, resulting into four types of adsorption isotherms. We propose the use of these maps as a powerful tool for the analysis of FEBID processes.



adsorption isotherm theory, BET model, continuum model, focused electron beam induced deposition, 3D nanoprinting, Langmuir model

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Beilstein Journal of Nanotechnology

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Engineering and Physical Sciences Research Council (EP/M008517/1)
This research was funded by an EPSRC Early Career Fellowship EP/M008517/1 and a Winton Fellowship. This work was conducted within the framework of the COST Action CM1301 (CELINA). DSH acknowledges funding from a Girton College Pfeiffer Scholarship.