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Modelling focused electron beam induced deposition beyond Langmuir adsorption

Published version
Peer-reviewed

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Authors

Sanz-Hernández, D 
Fernandez-Pacheco, Amalio  ORCID logo  https://orcid.org/0000-0002-3862-8472

Abstract

The continuum model of focused electron beam induced deposition (FEBID) is generalized to account for multilayer adsorption processes. Two types of adsorption energies, describing both physisorption and spontaneous chemisorption, are included. Steady state solutions under no diffusion are investigated and compared for a wide range of conditions. The different growth regimes observed are fully explained by relative changes in FEBID characteristic frequencies. Additionally, we present a set of FEBID frequency maps where growth rate and surface coverage are plotted as a function of characteristic timescales. From analyzing Langmuir, as well as homogeneous and heterogeneous multilayer maps, we infer that three types of growth regimes are possible for FEBID under no diffusion, resulting into four types of adsorption isotherms. We propose the use of these maps as a powerful tool for the analysis of FEBID processes.

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Keywords

adsorption isotherm theory, BET model, continuum model, focused electron beam induced deposition, 3D nanoprinting, Langmuir model

Journal Title

Beilstein Journal of Nanotechnology

Conference Name

Journal ISSN

2190-4286
2190-4286

Volume Title

8

Publisher

Beilstein-Institut
Sponsorship
Engineering and Physical Sciences Research Council (EP/M008517/1)
This research was funded by an EPSRC Early Career Fellowship EP/M008517/1 and a Winton Fellowship. This work was conducted within the framework of the COST Action CM1301 (CELINA). DSH acknowledges funding from a Girton College Pfeiffer Scholarship.