High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films.


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Authors
Zhang, Bowen 
Yun, Chao 
MacManus-Driscoll, Judith L 
Abstract

In this work, we have developed a new method for manipulating and transferring up to 5 mm × 10 mm epitaxial oxide thin films. The method involves fixing a PET frame onto a PMMA attachment film, enabling transfer of epitaxial films lifted-off by wet chemical etching of a Sr3Al2O6 sacrificial layer. The crystallinity, surface morphology, continuity, and purity of the films are all preserved in the transfer process. We demonstrate the applicability of our method for three different film compositions and structures of thickness ~ 100 nm. Furthermore, we show that by using epitaxial nanocomposite films, lift-off yield is improved by ~ 50% compared to plain epitaxial films and we ascribe this effect to the higher fracture toughness of the composites. This work shows important steps towards large-scale perovskite thin-film-based electronic device applications.

Description
Keywords
Article, 2D materials, Free-standing oxide thin films, High yield transfer, Wet etching, Crack prevention
Journal Title
Nanomicro Lett
Conference Name
Journal ISSN
2311-6706
2150-5551
Volume Title
13
Publisher
Springer Science and Business Media LLC
Sponsorship
Engineering and Physical Sciences Research Council (EP/L011700/1)
Engineering and Physical Sciences Research Council (EP/N004272/1)
Engineering and Physical Sciences Research Council (EP/P007767/1)
EPSRC (EP/T012218/1)
Leverhulme Trust (RPG-2015-017)
Royal Academy of Engineering (RAEng) (CiET1819\24)