Research data supporting "Modelling focused electron beam induced deposition beyond Langmuir adsorption"
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Data files supporting publication "Modelling focused electron beam induced deposition beyond Langmuir adsorption". The files included are: (1) multilayer_FEBID_solution_maps.nb (2) FEBID_Frequency_tool.xlsx File (1) Is a Wolphram Mathematica notebook, which is used to analytically solve the Multilayer FEBID model and generate normalized frequency maps where different regimes can be identified. This file was developed and tested using Version 11.0.0.0 of Wolphram Mathematica. File (2) is a Microsoft Excel Spreadsheet which can be used to calculate characteristic FEBID frequencies as a function of experimental parameters. This file was developed using the Package Microsoft Office 2016.
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Two programs are necessary in order to use the files:
(1) Wolphram Mathematica in order to solve the differential equations included in the article
(2) Microsoft Excel in order to use the FEBID frequency calculator presented in the article.
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Except where otherwised noted, this item's license is described as Attribution 4.0 International (CC BY 4.0)
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Engineering and Physical Sciences Research Council (EP/M008517/1)

