Growth of continuous graphene by open roll-to-roll chemical vapor deposition


Type
Article
Change log
Authors
Zhong, G 
D'Arsie, L 
Teo, KBK 
Rupesinghe, NL 
Abstract

jats:pWe demonstrate the growth of high-quality, continuous monolayer graphene on Cu foils using an open roll-to-roll (R2R) chemical vapor deposition (CVD) reactor with both static and moving foil growth conditions. N2 instead of Ar was used as carrier gas to reduce process cost, and the concentrations of H2 and CH4 reactants were kept below the lower explosive limit to ensure process safety for reactor ends open to ambient. The carrier mobility of graphene deposited at a Cu foil winding speed of 5 mm/min was 5270–6040 cm2 V−1 s−1 at room temperature (on 50 μm × 50 μm Hall devices). These results will enable the inline integration of graphene CVD for industrial R2R production.</jats:p>

Description
Keywords
40 Engineering, 51 Physical Sciences, 5104 Condensed Matter Physics
Journal Title
Applied Physics Letters
Conference Name
Journal ISSN
0003-6951
1077-3118
Volume Title
109
Publisher
AIP Publishing
Sponsorship
European Commission (285275)
Engineering and Physical Sciences Research Council (EP/K016636/1)
European Commission Horizon 2020 (H2020) Future and Emerging Technologies (FET) (696656)
The authors acknowledge funding from the EC project GRAFOL, grant 285275 and EPSRC grant Graphted EP/K0166636.