Research data supporting: "Room temperature sputtering of inclined c-axis ZnO for shear mode solidly mounted resonators"
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X-ray diffraction, SEM and frequency response data with and without liquid loadings on acoustic resonator devices.
This record supports publication and is available at http://dx.doi.org/10.1063/1.4940683
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csv tif dat s1p xls xlsx txt
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University of Cambridge
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Except where otherwised noted, this item's license is described as Attribution-NonCommercial 2.0 UK: England & Wales
Sponsorship
This work was supported by the EC [grant number SPIRE-01-2014-636820 ], Ministerio de Economcıa y Competitividad del Gobierno de Espana [grant number MAT2013-45957-R] and Cambridge Trusts.