2D and 3D thermal flow sensor modelling-A comparative analysis


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Type
Conference Object
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Authors
Gardner, ELW 
Description
Keywords
Numerical Modelling, Flow Sensor, MEMS, CMOS
Journal Title
Proceedings of the International Semiconductor Conference, CAS
Conference Name
2017 International Semiconductor Conference (CAS)
Journal ISSN
1545-827X
Volume Title
2017-October
Publisher
IEEE