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Edge-anchored mode-matched micromachined gyroscopic disk resonator

Accepted version
Peer-reviewed

Type

Conference Object

Change log

Authors

Zou, X 
Seshia, AA 

Abstract

© 2017 IEEE. This paper reports on a vacuum packaged circular disk gyroscopic resonator with T-shape anchors fabricated in a (100) single crystalline silicon substrate. This device topology simplifies the fabrication process as compared to previous approaches to realize center-anchored disk gyroscopes. Mode-matching of the trigonal modes of the disk is realized with open-loop characterization results demonstrating a Quality factor exceeding 1.5 million with an initial modal frequency split of 4.7 Hz and a natural frequency of approximately 0.976 MHz (4.81 ppm split). An approach to effective mode matching of such devices is described.

Description

Keywords

40 Engineering, 4009 Electronics, Sensors and Digital Hardware, 51 Physical Sciences

Journal Title

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference Name

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Journal ISSN

Volume Title

Publisher

IEEE