Edge-anchored mode-matched micromachined gyroscopic disk resonator

© 2017 IEEE. This paper reports on a vacuum packaged circular disk gyroscopic resonator with T-shape anchors fabricated in a (100) single crystalline silicon substrate. This device topology simplifies the fabrication process as compared to previous approaches to realize center-anchored disk gyroscopes. Mode-matching of the trigonal modes of the disk is realized with open-loop characterization results demonstrating a Quality factor exceeding 1.5 million with an initial modal frequency split of 4.7 Hz and a natural frequency of approximately 0.976 MHz (4.81 ppm split). An approach to effective mode matching of such devices is described.

Keywords

40 Engineering, 4009 Electronics, Sensors and Digital Hardware, 51 Physical Sciences

Journal Title

TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems

Conference Name

2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)

Publisher

IEEE

Publisher DOI

https://doi.org/10.1109/TRANSDUCERS.2017.7994509

Rights and licensing

Except where otherwised noted, this item's license is described as http://www.rioxx.net/licenses/all-rights-reserved

Sponsorship

Natural Environment Research Council (NE/N012097/1)

Collections

University of Cambridge Research Outputs (Articles and Conferences)