Edge-anchored mode-matched micromachined gyroscopic disk resonator
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Abstract
© 2017 IEEE. This paper reports on a vacuum packaged circular disk gyroscopic resonator with T-shape anchors fabricated in a (100) single crystalline silicon substrate. This device topology simplifies the fabrication process as compared to previous approaches to realize center-anchored disk gyroscopes. Mode-matching of the trigonal modes of the disk is realized with open-loop characterization results demonstrating a Quality factor exceeding 1.5 million with an initial modal frequency split of 4.7 Hz and a natural frequency of approximately 0.976 MHz (4.81 ppm split). An approach to effective mode matching of such devices is described.
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40 Engineering, 4009 Electronics, Sensors and Digital Hardware, 51 Physical Sciences
Journal Title
TRANSDUCERS 2017 - 19th International Conference on Solid-State Sensors, Actuators and Microsystems
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2017 19th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)
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IEEE