Split resonances for simultaneous detection and control measurements in a single bulk acoustic wave (BAW) sensor.


Type
Article
Change log
Abstract

A self-referenced resonator consisting of two distinct areas of the top electrode made from Mo and a thin (5-30 nm) functional Au layer is shown. The fundamental frequencies for both the shear (∼1 GHz) and longitudinal (∼2 GHz) modes are split in two, such that mass attachment on the functional layer region causes frequency shifts in only one of the resonances, allowing a new approach of using the difference between the two frequencies to be used to measure mass attachment; this reduces the importance of device-to-device variability in absolute resonant frequency as a result of device fabrication.

Description
Keywords
0903 Biomedical Engineering
Journal Title
Nanoscale
Conference Name
Journal ISSN
2040-3364
2040-3372
Volume Title
10
Publisher
Royal Society of Chemistry (RSC)
Sponsorship
Cancer Research UK Cambridge Institute Early Detection Programme Pump-Priming 2016 award. Cambridge Commonwealth Trusts.