Multi-Mode Piezoelectric Micromachined Tranducers for Multi-Channel Acoustic Power Transfer and Data Telemetry

Abstract

This paper reports on a piezoelectric micromachined ultrasonic transducer (PMUT) with a customized electrode design based on distinctive mode shapes, which enables a single transducer to realize acoustic power transfer and multi-channel data telemetry simultaneously. A prototype device is tested for concurrent 2-channel functionality in wireless power transfer and data telemetry for simultaneous transmission of carrier signals at frequencies of 101.45 kHz and 828 kHz corresponding to specific device modes. An output power transfer of 1.52 μW and data rate of 200 kbps is demonstrated across a pair of PMUT devices in air for a separation of 1 cm.