Cleanroom‐Free Toolkit for Patterning Submicron‐Resolution Bioelectronics on Flexibles

Abstract

Fabricating flexible bioelectronics remains an ongoing challenge in pursuing a cost‐effective, efficient, scalable, and environmentally friendly approach for research and commercial applications. The current dominant method, lithography, presents challenges due to its incompatibility with solvent‐sensitive biomaterials and the phase mismatch between the photoresist and flexible substrates, such as elastomers. This study proposes a simplified, cleanroom‐free toolkit as a potential alternative to lithography for fabricating intricate bioelectronics on flexible substrates with submicron resolution. This technique integrates a two‐photon laser writing mask, mask transfer, and multi‐layer/material patterning processes, enabling batch‐to‐batch processing and making it suitable for scalable production. With excellent conformal patterning capability, different functional and encapsulation biomaterials can be patterned on flexible substrates, including elastomers, parylene‐C, polymer sheets, skin, fabric, and plant leaves. The versatility of this toolkit is validated by fabricating various prototypes of wearable and implantable bioelectronics, demonstrating excellent performance.