Eight parametric resonances in a multi-frequency wideband MEMS piezoelectric vibration energy harvester

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Jia, Y 
Seshia, AA 

This paper presents a multi-order parametric resonant MEMS piezoelectric disk membrane, for the purpose of broadening the operational frequency bandwidth of a vibration energy harvester by employing the nonlinearity-induced bandwidth broadening associated with this phenomenon as well as the multi-frequency response associated with the higher orders. The fundamental mode -3dB bandwidth at 2.0 g recorded 55 Hz, while the first parametric resonant peak exhibited 365 Hz and the -3dB of the first 8 orders accumulated to 604 Hz. The membrane parametric resonator also experimentally demonstrated over 3-folds improvement in power density compared to a conventional direct resonator (cantilever), when subjected to band-limited white noise.

crystal resonators, energy harvesting, frequency response, micromechanical resonators, piezoelectric transducers, vibrations, band-limited white noise, cantilever, frequency 365 Hz, frequency 55 Hz, frequency 604 Hz, membrane parametric resonator, multifrequency response, multifrequency wide-band MEMS piezoelectric vibration energy harvester, multiorder parametric resonant MEMS piezoelectric disk membrane, nonlinearity-induced bandwidth broadening, operational frequency bandwidth broadening, parametric resonances, power density, micromechanical devices
Journal Title
Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Conference Name
2016 IEEE 29th International Conference on Micro Electro Mechanical Systems (MEMS)
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Engineering and Physical Sciences Research Council (EP/L010917/1)
This work was supported by Innovate UK (Project reference: 131183).