Research data supporting "Threshold voltage mapping at the nanoscale of GaN-based high electron mobility transistor structures using hyperspectral scanning capacitance microscopy"
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Description
The dataset includes data for the associated article, encompassing the atomic force microscopy (AFM, in PeakForce Tapping mode), conventional and hyperspectral scanning capacitance microscopy (SCM), and scanning capacitance spectroscopy (SCS) data related to the GaN-based high electron mobility transistor (HEMT) structures. All the data were acquired using a Bruker Dimension Icon Pro AFM. The AFM was coupled with a Bruker SCM module when collecting the SCM and SCS data. All the data are saved as '.spm' files viewable with Bruker's NanoScope Analysis software. The hyperspectral SCM data can be further analysed using the freeware Hyperspy.
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All the data are saved as '.spm' files viewable with Bruker's NanoScope Analysis software. The hyperspectral SCM data can be further analysed using the freeware Hyperspy.
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Except where otherwised noted, this item's license is described as Attribution 4.0 International (CC BY 4.0)
Sponsorship
Engineering and Physical Sciences Research Council (EP/N017927/1)
Engineering and Physical Sciences Research Council (EP/P024947/1)
Engineering and Physical Sciences Research Council (EP/R00661X/1)
Engineering and Physical Sciences Research Council (EP/P024947/1)
Engineering and Physical Sciences Research Council (EP/R00661X/1)
Engineering and Physical Sciences Research Council
Cambridge Royce Facilities
Sir Henry Royce Institute
China Scholarship Council
Cambridge Commonwealth, European & International Trust