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Particulate Mass Sensing with Piezoelectric Bulk Acoustic Mode Resonators

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Zielinski, AT 
Prasad, A 
Seshia, AA 


Current portable particle detection instruments typically rely on optical methods which are limited to 100 nm diameter particles. Microfabricated bulk acoustic resonators, when used as mass balances, could take particle detection below this limit. This study examines the collection of particles onto piezoelectric bulk acoustic mode resonators from gaseous flow using classical impaction. Collection of both polystyrene latex alpha-pinene secondary organic aerosol particles was examined in terms of frequency shift and collection efficiency. A new experimental setup was introduced which allows for adjusting major impactor, resonator, and aerosol properties. Preliminary results show the setup works for both particles while the saturation limit was not reached within an hour despite highly elevated particle concentrations.



MEMS resonators, particle collection, impactor, piezoelectric, square extensional mode, ORGANIC AEROSOL-PARTICLES

Journal Title

Conference Name

2016 IEEE International Frequency Control Symposium (IFCS)

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IEEE, 345 E 47TH ST, NEW YORK, NY 10017 USA
Conference sponsors: IEEE, UFFC