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Research data supporting "3D surface profilometry using neutral helium atom"


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Type

Dataset

Change log

Authors

Radić, Aleksandar 
Lambrick, Sam M 
Ward, David J 
von Jeinsen, Nick A 
Jardine, Andrew P 

Description

The dataset contains raw and processed SHeM data as well as a supporting SEM micrograph. The raw SHeM data is provided in 3 different formats, while the processed data (via the heliometric stereo method) is presented as a 3D surface profile. A script is provided that performs the final stage in the analysis.

Version

Software / Usage instructions

.mat data files can be opened most easily with Matlab (https://uk.mathworks.com/products/matlab.html), Gwyddion data files can be opened in Gwyddion (http://gwyddion.net/). .png images and text files can be opened readily with many software tools.

Keywords

Helium atom scattering, Neutral atom microscopy, Scanning helium microscopy, Surface metrology

Publisher

Sponsorship
Engineering and Physical Sciences Research Council (EP/R008272/1)
EPSRC (EP/T00634X/1)
EPSRC (EP/X525686/1)
The work was supported by EPSRC grant EP/R008272/1, EPSRC award EP/T00634X/1, and IAA award EP/X525686/1. The work was also supported by Mathworks Ltd. and Ionoptika Ltd.
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