High Yield Transfer of Clean Large-Area Epitaxial Oxide Thin Films

Abstract

Highlights: A new way to achieve high yield and large area oxide thin film transfer is developed. Three different film compositions are demonstrated: SrRuO3, CeO2, and CeO2/STO nanocomposite films. Cracks, wrinkles, and damages are prevented by the new transfer method. They are commonly introduced by conventional transfer processes. Vertically aligned nanocomposite (VAN) structures can further improve the transfer yield. Possible mechanisms related to increased fracture toughness are proposed. We have opened up a route to large-scale oxide thin-film-based electronic device applications.