CMOS MEMS Hot-Film Thermoelectronic Flow Sensor

Accepted version
Repository URI
https://www.repository.cam.ac.uk/handle/1810/286835
Repository DOI
https://doi.org/10.17863/CAM.34141
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Accepted version (1.03 MB)
Type
Article
Change log
Authors
Udrea, F 
Description
Keywords
Sensor phenomena, flow sensor, silicon-on-insulator, complementary metal-oxide semiconductor (CMOS), microelectromechanical system (MEMS), diode temperature sensor, wall shear stress
Journal Title
IEEE Sensors Letters
Conference Name
Journal ISSN
2475-1472
2475-1472
Volume Title
1
Publisher
Institute of Electrical and Electronics Engineers (IEEE)
Publisher DOI
https://doi.org/10.1109/LSENS.2017.2757086
Rights
http://www.rioxx.net/licenses/all-rights-reserved
Collections
Cambridge University Research Outputs