CMOS MEMS Hot-Film Thermoelectronic Flow Sensor
| cam.issuedOnline | 2017-10-19 | |
| dc.contributor.author | De Luca, A | |
| dc.contributor.author | Udrea, F | |
| dc.contributor.orcid | De Luca, A [0000-0002-9481-4747] | |
| dc.date.accessioned | 2018-12-13T00:32:23Z | |
| dc.date.available | 2018-12-13T00:32:23Z | |
| dc.date.issued | 2017 | |
| dc.identifier.doi | 10.17863/CAM.34141 | |
| dc.identifier.eissn | 2475-1472 | |
| dc.identifier.issn | 2475-1472 | |
| dc.identifier.uri | https://www.repository.cam.ac.uk/handle/1810/286835 | |
| dc.publisher | Institute of Electrical and Electronics Engineers (IEEE) | |
| dc.publisher.url | http://dx.doi.org/10.1109/lsens.2017.2757086 | |
| dc.subject | Sensor phenomena | |
| dc.subject | flow sensor | |
| dc.subject | silicon-on-insulator | |
| dc.subject | complementary metal-oxide semiconductor (CMOS) | |
| dc.subject | microelectromechanical system (MEMS) | |
| dc.subject | diode temperature sensor | |
| dc.subject | wall shear stress | |
| dc.title | CMOS MEMS Hot-Film Thermoelectronic Flow Sensor | |
| dc.type | Article | |
| prism.endingPage | 4 | |
| prism.issueIdentifier | 6 | |
| prism.publicationDate | 2017 | |
| prism.publicationName | IEEE Sensors Letters | |
| prism.startingPage | 1 | |
| prism.volume | 1 | |
| rioxxterms.licenseref.startdate | 2017-12 | |
| rioxxterms.licenseref.uri | http://www.rioxx.net/licenses/all-rights-reserved | |
| rioxxterms.type | Journal Article/Review | |
| rioxxterms.version | AM | |
| rioxxterms.versionofrecord | 10.1109/LSENS.2017.2757086 |
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