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CMOS MEMS Hot-Film Thermoelectronic Flow Sensor

cam.issuedOnline2017-10-19
dc.contributor.authorDe Luca, A
dc.contributor.authorUdrea, F
dc.contributor.orcidDe Luca, A [0000-0002-9481-4747]
dc.date.accessioned2018-12-13T00:32:23Z
dc.date.available2018-12-13T00:32:23Z
dc.date.issued2017
dc.identifier.doi10.17863/CAM.34141
dc.identifier.eissn2475-1472
dc.identifier.issn2475-1472
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/286835
dc.language.isoeng
dc.publisherInstitute of Electrical and Electronics Engineers (IEEE)
dc.publisher.urlhttp://dx.doi.org/10.1109/lsens.2017.2757086
dc.subjectSensor phenomena
dc.subjectflow sensor
dc.subjectsilicon-on-insulator
dc.subjectcomplementary metal-oxide semiconductor (CMOS)
dc.subjectmicroelectromechanical system (MEMS)
dc.subjectdiode temperature sensor
dc.subjectwall shear stress
dc.titleCMOS MEMS Hot-Film Thermoelectronic Flow Sensor
dc.typeArticle
prism.endingPage4
prism.issueIdentifier6
prism.publicationDate2017
prism.publicationNameIEEE Sensors Letters
prism.startingPage1
prism.volume1
rioxxterms.licenseref.startdate2017-12
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserved
rioxxterms.typeJournal Article/Review
rioxxterms.versionAM
rioxxterms.versionofrecord10.1109/LSENS.2017.2757086

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