Self-Aligned Fabrication of Nanogap Based Zinc Oxide Nanowire Schottky Devices Using Adhesion Lithography
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As an active material, ZnO nanowires have many advantages in electronic devices due to their low defect density, bottom-up growth, and ability to form single crystals. However, these advantages can only be realized if high quality contacts can be made to the nanowires, which require expensive techniques such as electron beam lithography. To fabricate nano devices on a large scale, this work focuses on combining bottom-up nanowire growth with nanogap fabrication using adhesion lithography (A-Lith); a technique for producing coplanar nanogaps with a spacing of less than 10 nm to tens of nanometers. A-Lith uses self-assembled monolayers to alter the adhesion forces between metals or oxides, which can be overlapped and peeled away from each other to form asymmetric or symmetric nanogaps.
To realize bottom-up nanowire devices using A-Lith, the growth of ZnO nanowires was first optimized by controlling the seed layer geometry to obtain horizontal nanowires, which were used to bridge the nanogap (40 nm) created by A-Lith between ZnO/Ti and Au. The nanowires were grown using the hydrothermal method in which 60 nm thick ZnO, coated with 40 nm Ti (ohmic contact), acted as the seed layer. To make the Schottky contact, 40 nm thick Au was thermally evaporated, resulting in nanowire Schottky diodes. The diodes exhibited rectification ratio of > 10
To test the Schottky device as a multi-purpose sensor, the device was characterized as a function of temperature, which demonstrated the device’s potential as an ambient temperature sensor. Varying the temperature from 20 °C to 120 °C changed the forward and the reverse currents by a factor of 10
Finally, the Schottky devices were gated to form gate-tunable Schottky diodes. Both top and bottom gated device structures were fabricated. The top-gate devices exhibited depletion mode of operation, while the bottom-gate devices exhibited operation in both depletion and accumulation modes. The bottom gate was more effective in changing the rectification ratio of the devices, wherein a change of ∼10