Mode-localized sensing in micro- and nano-mechanical resonator arrays
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Authors
Journal Title
Proceedings of IEEE Sensors
Conference Name
2016 IEEE SENSORS
ISSN
1930-0395
Publisher
IEEE
Language
English
Type
Conference Object
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Seshia, A. (2017). Mode-localized sensing in micro- and nano-mechanical resonator arrays. Proceedings of IEEE Sensors https://doi.org/10.1109/ICSENS.2016.7808399
Abstract
Micromachined resonant sensors have been researched for several decades for a variety of applications with potential benefits in terms of improved sensitivity and scalability relative to other transduction principles. Conventional implementations usually involve detection elements monitoring resonant frequency and/or dissipation shift in a single degree-of-freedom or several independent degrees-of-freedom. This paper discusses a complementary approach to resonant sensing in which the eigenstates in coupled array structures can be employed as a read-out mechanism offering the potential for both increased sensitivity and excellent common mode rejection. The technique, dubbed 'mode-localized sensing', is based on the spatial localization of vibration in an array of nearly identical weakly coupled resonators wherein the eigenstates are seen to be sensitive signatures of symmetry-breaking perturbations in structural parameters. The sensing methodology has been applied to a range of applications including gravimetric sensing, electrometry, inertial sensors and force sensors where in high accuracy approaches to physical transduction are often of interest. The paper concludes with a discussion of the current challenges in the field and an outlook on future developments.
Keywords
resonators, resonant sensors, vibration mode localization, mode-localized sensing
Identifiers
External DOI: https://doi.org/10.1109/ICSENS.2016.7808399
This record's URL: https://www.repository.cam.ac.uk/handle/1810/267305
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