Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope
Chuah, Joon Huang
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Chuah, J. H., & Holburn, D. (2011). Design of Pixellated CMOS Photon Detector for Secondary Electron Detection in the Scanning Electron Microscope. https://doi.org/10.1155/2011/648487
This paper presents a novel method of detecting secondary electrons generated in the scanning electron microscope (SEM). The method suggests that the photomultiplier tube (PMT), traditionally used in the Everhart-Thornley (ET) detector, is to be replaced with a configurable multipixel solid-state photon detector offering the advantages of smaller dimension, lower supply voltage and power requirements, and potentially cheaper product cost. The design of the proposed detector has been implemented using a standard 0.35 μm CMOS technology with optical enhancement. This microchip comprises main circuit constituents of an array of photodiodes connecting to respective noise-optimised transimpedance amplifiers (TIAs), a selector-combiner (SC) circuit, and a postamplifier (PA). The design possesses the capability of detecting photons with low input optical power in the range of 1 nW with 100 μm × 100 μm sized photodiodes and achieves a total amplification of 180 dBΩ at the output.
External DOI: https://doi.org/10.1155/2011/648487
This record's URL: https://www.repository.cam.ac.uk/handle/1810/267562
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Rights Holder: Copyright © 2011 Joon Huang Chuah and David Holburn. This is an open access article distributed under the Creative Commons Attribution License, which permits unrestricted use, distribution, and reproduction in any medium, provided the original work is properly cited.
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