Integration of Au-SnO<inf>2</inf> nanocomposites with power efficient MEMS substrate for acetone sensing

Thumbnail
View / Open Files
Authors
Santra, S
De Luca, A
Guha, PK
Udrea, F
Ray, SK
Gardner, JW
Publication Date
2017
Journal Title
Proceedings of IEEE Sensors
Conference Name
2017 IEEE SENSORS
ISSN
1930-0395
ISBN
9781509010127
Publisher
IEEE
Volume
2017-December
Pages
1-3
Type
Conference Object
Metadata
Show full item record
Citation
Santra, S., De Luca, A., Guha, P., Udrea, F., Ray, S., & Gardner, J. (2017). Integration of Au-SnO<inf>2</inf> nanocomposites with power efficient MEMS substrate for acetone sensing. Proceedings of IEEE Sensors, 2017-December 1-3. https://doi.org/10.1109/ICSENS.2017.8234332
Abstract
© 2017 IEEE. In this paper we report synthesis of Au-SnO2nanocomposites, and their integration on micro-hotplates through dip pen nano-lithography to realize a resistive acetone sensor device. The devices are power efficient (8.2°C temperature increase requires for 1 milli watt of power). The devices were characterized exposing acetone in presence of both dry and humid (40% RH) air. The response varies between 3.8 times (with 250 ppm) and 5.5 times (1000 ppm), and did not show much deterioration in presence of humidity.
Keywords
micor-hotplate, acetone sensor, gold tin oxide
Sponsorship
European Commission (611887)
Identifiers
External DOI: https://doi.org/10.1109/ICSENS.2017.8234332
This record's URL: https://www.repository.cam.ac.uk/handle/1810/285929
Rights
Licence:
http://www.rioxx.net/licenses/all-rights-reserved
Statistics



Total file downloads (since January 2020). For more information on metrics see the IRUS guide.