Constant temperature operation of a CMOS MEMS thermoelectronic multidirectional flow sensor

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Authors
De Luca, A
Coull, JD
Udrea, F
Publication Date
2017-10
Journal Title
Proceedings of IEEE Sensors
Conference Name
2017 IEEE SENSORS
ISSN
1930-0395
ISBN
9781509010127
Publisher
IEEE
Volume
2017-December
Pages
1-3
Type
Conference Object
This Version
AM
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Citation
De Luca, A., Coull, J., & Udrea, F. (2017). Constant temperature operation of a CMOS MEMS thermoelectronic multidirectional flow sensor. Proceedings of IEEE Sensors, 2017-December 1-3. https://doi.org/10.1109/ICSENS.2017.8233982
Abstract
© 2017 IEEE. In this paper we present the first CMOS MEMS thermoelectronic multidirectional flow sensor. We also introduce a Constant Temperature circuit based on diode thermal feedback and calibrate the sensor for 2D multidirectional wall shear stress measurements up to 2 Pa. The sensor electro-thermal transduction efficiency is 115 pW/°C. Average sensitivity is 250 mV/Pa at 225 °C operating temperature (Vd=0.55 V), and angular accuracy is below 5°.
Sponsorship
European Commission (288481)
Identifiers
External DOI: https://doi.org/10.1109/ICSENS.2017.8233982
This record's URL: https://www.repository.cam.ac.uk/handle/1810/286846
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Licence:
http://www.rioxx.net/licenses/all-rights-reserved
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