Research data supporting "Atomic layer deposited α-Ga2O3 solar-blind photodetectors"
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Authors
Moloney, James
Tesh, Oliver
Singh, Manikant
Roberts, Joseph
Lee, Lana
Huq, Tahmida
Brister, Jirayut
Karboyan, Serge
Kuball, Martin
Chalker, Paul
Oliver, Rachel
Publication Date
2019-08-23Type
Dataset
Metadata
Show full item recordCitation
Moloney, J., Tesh, O., Singh, M., Roberts, J., Jarman, J., Lee, L., Huq, T., et al. (2019). Research data supporting "Atomic layer deposited α-Ga2O3 solar-blind photodetectors" [Dataset]. https://doi.org/10.17863/CAM.42970
Description
Low temperature atomic layer deposition was used to deposit α-Ga2O3 films, which were subsequently annealed at various temperatures and atmospheres. The α-Ga2O3 phase is stable up to 400 oC, which is also the temperature that yields the most intense and sharpest reflection by X-ray diffraction. Upon annealing at 450 oC and above, the material gradually turns into the more thermodynamically stable ε or β phase. The suitability of the materials for solar-blind photodetector applications has been demonstrated with the best responsivity achieved being 1.2 A/W under 240 nm illumination and 10 V bias, for the sample annealed at 400 oC in argon. It is worth noting however that the device performance strongly depends on the annealing conditions, with the device annealed in forming gas behaving poorly. Given that the tested devices have similar microstructure, the discrepancies in device performance are attributed to hydrogen impurities.
Format
N/A
Keywords
Gallium oxide, Ultraviolet, Photodetector, Atomic layer deposition, Anneal
Relationships
Publication Reference: https://doi.org/10.1088/1361-6463/ab3b76https://www.repository.cam.ac.uk/handle/1810/296062
Sponsorship
EPSRC (via University of Bristol) (EP/P00945X/1)
Identifiers
This record's DOI: https://doi.org/10.17863/CAM.42970
Rights
Attribution-NonCommercial-NoDerivatives 4.0 International, Attribution-NonCommercial-NoDerivatives 4.0 International, Attribution-NonCommercial-NoDerivatives 4.0 International, Attribution-NonCommercial-NoDerivatives 4.0 International, Attribution-NonCommercial-NoDerivatives 4.0 International, Attribution-NonCommercial-NoDerivatives 4.0 International, Attribution-NonCommercial-NoDerivatives 4.0 International
Licence URL: http://creativecommons.org/licenses/by-nc-nd/4.0/http://creativecommons.org/licenses/by-nc-nd/4.0/http://creativecommons.org/licenses/by-nc-nd/4.0/http://creativecommons.org/licenses/by-nc-nd/4.0/http://creativecommons.org/licenses/by-nc-nd/4.0/http://creativecommons.org/licenses/by-nc-nd/4.0/http://creativecommons.org/licenses/by-nc-nd/4.0/