Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators.
Gerrard, Dustin D
Kenny, Thomas W
MetadataShow full item record
Zhou, X., Zhao, C., Xiao, D., Sun, J., Sobreviela, G., Gerrard, D. D., Chen, Y., et al. (2019). Dynamic modulation of modal coupling in microelectromechanical gyroscopic ring resonators.. Nature communications, 10 (1), 4980. https://doi.org/10.1038/s41467-019-12796-0
Understanding and controlling modal coupling in micro/nanomechanical devices is integral to the design of high-accuracy timing references and inertial sensors. However, insight into specific physical mechanisms underlying modal coupling, and the ability to tune such interactions is limited. Here, we demonstrate that tuneable mode coupling can be achieved in capacitive microelectromechanical devices with dynamic electrostatic fields enabling strong coupling between otherwise uncoupled modes. A vacuum-sealed microelectromechanical silicon ring resonator is employed in this work, with relevance to the gyroscopic ateral modes of vibration. It is shown that a parametric pumping scheme can be implemented through capacitive electrodes surrounding the device that allows for the mode coupling strength to be dynamically tuned, as well as allowing greater flexibility in the control of the coupling stiffness. Electrostatic pump based sideband coupling is demonstrated, and compared to conventional strain-mediated sideband operations. Electrostatic coupling is shown to be very efficient, enabling strong, tunable dynamical coupling.
This work is primarily supported by the UK Natural Environment Research Council under grant number NE/N012097/1.
Embargo Lift Date
External DOI: https://doi.org/10.1038/s41467-019-12796-0
This record's URL: https://www.repository.cam.ac.uk/handle/1810/297017
All rights reserved