Low temperature growth and optical properties of α-Ga2 O3 deposited on sapphire by plasma enhanced atomic layer deposition
Accepted version
Peer-reviewed
Repository URI
Repository DOI
Change log
Authors
Description
Keywords
Characterization, Crystal structure, Crystal morphology, X-ray diffraction, Atomic layer epitaxy, Gallium compounds
Journal Title
Journal of Crystal Growth
Conference Name
Journal ISSN
0022-0248
1873-5002
1873-5002
Volume Title
528
Publisher
Elsevier BV
Publisher DOI
Sponsorship
Engineering and Physical Sciences Research Council (EP/P00945X/1)
Engineering and Physical Sciences Research Council (EP/M010589/1)
Engineering and Physical Sciences Research Council (EP/P024947/1)
Engineering and Physical Sciences Research Council (EP/S019367/1)
Engineering and Physical Sciences Research Council (EP/R00661X/1)
Engineering and Physical Sciences Research Council (EP/M010589/1)
Engineering and Physical Sciences Research Council (EP/P024947/1)
Engineering and Physical Sciences Research Council (EP/S019367/1)
Engineering and Physical Sciences Research Council (EP/R00661X/1)