Simultaneous Flow and Thermal Conductivity Sensing on a Single Chip Using Artificial Neural Networks

Simultaneous Flow and Thermal Conductivity Sensing on a Single Chip Using Artificial Neural Networks

Accepted version

Peer-reviewed

Repository URI

https://www.repository.cam.ac.uk/handle/1810/308275

Repository DOI

https://doi.org/10.17863/CAM.55366

Files

Accepted version (669.59 KB)

Type

Article

Authors

Gardner, ELW

https://orcid.org/0000-0002-0990-0481

Vincent, TA

https://orcid.org/0000-0002-3520-6610

De Luca, A

https://orcid.org/0000-0002-9481-4747

Udrea, F

https://orcid.org/0000-0002-7288-3370

Keywords

MEMS, flow sensor, thermal conductivity sensor, micro-fabrication, artificial neural networks

Journal Title

IEEE Sensors Journal

Journal ISSN

1530-437X
1558-1748

Volume Title

20

Publisher

Institute of Electrical and Electronics Engineers (IEEE)

Publisher DOI

https://doi.org/10.1109/JSEN.2020.2965217

Rights

All rights reserved

Sponsorship

Innovate UK (103383)

Collections

Cambridge University Research Outputs