Research data supporting "Defect characterisation of {10-13} GaN by electron microscopy"
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Figure 1a) Raw BSE image of the semipolar GaN sample at 6.9° tilt Figure 1b) Raw BSE image of the semipolar GaN sample at 3.9° tilt Figure 1c) Raw BSE image of the semipolar GaN sample at -1.8° tilt Figure 1d) Raw SE image of the semipolar GaN sample at 6.9° tilt
Figure 2a) Raw SE image of the area mapped by CL Figure 2b) Raw data for the CL meanspectrum at 10K in .csv format Figure 2 CL Map) Raw data of the hyperspectral CL map measured at 10K in .bin format
Figure 3a) Raw data of temperature dependent spectra away from defects in .csv format Figure 3b) Raw data of temperature dependent spectra on I1 stacking faults in .csv format Figure 3c) Raw data of temperature dependent spectra on prismatic stacking faults in .csv format
Figure 4a) Raw SE image of the area mapped by CL Figure 4 CL Map) Raw data of the hyperspectral CL map measured at 300K in .bin format
All .bin files can be opened with the open source LumiSpy Python library