Reverse engineering Flash EEPROM memories using Scanning Electron Microscopy
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In this article, a methodology to extract Flash EEPROM memory contents is presented. Samples are first backside prepared to expose the tunnel oxide of floating gate transistors. Then, a Scanning Electron Microscope (SEM) in the so called Passive Voltage Contrast (PVC) mode allows distinguishing ‘0’ and ‘1’ bit values stored in individual memory cell. Using SEM operator-free acquisition and standard image processing technique we demonstrate the possible automating of such technique over a full memory. The presented fast, efficient and low cost technique is successfully implemented on 0.35
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1611-3349