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Enhanced quantification for 3D SEM-EDS: using the full set of available X-ray lines.


Type

Article

Change log

Authors

Burdet, Pierre 
Croxall, SA 
Midgley, PA 

Abstract

An enhanced method to quantify energy dispersive spectra recorded in 3D with a scanning electron microscope (3D SEM-EDS) has been previously demonstrated. This paper presents an extension of this method using all the available X-ray lines generated by the beam. The extended method benefits from using high energy lines, that are more accurately quantified, and from using soft X-rays that are highly absorbed and thus more surface sensitive. The data used to assess the method are acquired with a dual beam FIB/SEM investigating a multi-element Ni-based superalloy. A high accelerating voltage, needed to excite the highest energy X-ray line, results in two available X-ray lines for several elements. The method shows an improved compositional quantification as well as an improved spatial resolution.

Description

Keywords

3D chemical analysis, 3D image analysis, 3D microanalysis, Energy dispersive X-ray spectrometry, Focused ion beam, Quantification, Tomographic spectral imaging

Journal Title

Ultramicroscopy

Conference Name

Journal ISSN

0304-3991
1879-2723

Volume Title

148

Publisher

Elsevier BV
Sponsorship
Engineering and Physical Sciences Research Council (EP/H500375/1)
Engineering and Physical Sciences Research Council (EP/E012477/1)
Engineering and Physical Sciences Research Council (EP/M005607/1)
Engineering and Physical Sciences Research Council (EP/H022309/1)
European Research Council (291522)