Spectroscopic Imaging Ellipsometry for Spatially Resolved Mapping of Layer-by-Layer Oxidation in WSe2

Abualnaja, Faris; Chu, Pui Hei Greg; Lin, Xiaofan; Chen, H-Y; Lin, J-J; Joyce, Hannah; Hofmann, Stephan; Smith, Luke; Alexander-Webber, Jack

doi:https://doi.org/10.17863/CAM.129598

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