Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer
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Chen, G., Zhao, X., Wang, X., Jin, H., Li, S., Dong, S., Flewitt, A., et al. (2015). Film bulk acoustic resonators integrated on arbitrary substrates using a polymer support layer. Scientific Reports, 5 (9510)https://doi.org/10.1038/srep09510
The film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components. A new architecture is demonstrated which permits fabrication and integration of FBARs on arbitrary substrates. Wave confinement is achieved by fabricating the resonator on a polyimide support layer. Results show when the polymer thickness is greater than a critical value, d, the FBARs have similar performance to devices using alternative architectures. For ZnO FBARs operating at 1.3–2.2 GHz, d is ~9 μm, and the devices have a Q-factor of 470, comparable to 493 for the membrane architecture devices. The polymer support makes the resonators insensitive to the underlying substrate. Yields over 95% have been achieved on roughened silicon, copper and glass.
This work was supported by the NSFC (Nos. 61376118, 61171038, 61274037, 61204124 and 61301046), the Fundamental Research Funds for the Central Universities (Nos.2014QNA5002 and 2012QNA5010), and Research Fund for the Doctoral Program of Higher Education of China (20120101110054, 20120101110031). The authors thank the Innovation Platform for Micro/Nano Device and System Integration and Cyrus Tang Centre for Sensor Materials and Applications at Zhejiang University.
External DOI: https://doi.org/10.1038/srep09510
This record's URL: https://www.repository.cam.ac.uk/handle/1810/252550
Attribution 2.0 UK: England & Wales
Licence URL: http://creativecommons.org/licenses/by/2.0/uk/
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