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dc.contributor.authorChen, Guohaoen
dc.contributor.authorZhao, Xinruen
dc.contributor.authorWang, Xiaozhien
dc.contributor.authorJin, Haoen
dc.contributor.authorLi, Shijianen
dc.contributor.authorDong, Shurongen
dc.contributor.authorFlewitt, Andrewen
dc.contributor.authorMilne, Billen
dc.contributor.authorLuo, JKen
dc.date.accessioned2015-11-09T13:22:29Z
dc.date.available2015-11-09T13:22:29Z
dc.date.issued2015-03-31en
dc.identifier.citationScientific Reports 2015, 5, 9510. doi: 10.1038/srep09510en
dc.identifier.issn2045-2322
dc.identifier.urihttps://www.repository.cam.ac.uk/handle/1810/252550
dc.description.abstractThe film bulk acoustic resonator (FBAR) is a widely-used MEMS device which can be used as a filter, or as a gravimetric sensor for biochemical or physical sensing. Current device architectures require the use of an acoustic mirror or a freestanding membrane and are fabricated as discrete components. A new architecture is demonstrated which permits fabrication and integration of FBARs on arbitrary substrates. Wave confinement is achieved by fabricating the resonator on a polyimide support layer. Results show when the polymer thickness is greater than a critical value, d, the FBARs have similar performance to devices using alternative architectures. For ZnO FBARs operating at 1.3–2.2 GHz, d is ~9 μm, and the devices have a Q-factor of 470, comparable to 493 for the membrane architecture devices. The polymer support makes the resonators insensitive to the underlying substrate. Yields over 95% have been achieved on roughened silicon, copper and glass.
dc.description.sponsorshipThis work was supported by the NSFC (Nos. 61376118, 61171038, 61274037, 61204124 and 61301046), the Fundamental Research Funds for the Central Universities (Nos.2014QNA5002 and 2012QNA5010), and Research Fund for the Doctoral Program of Higher Education of China (20120101110054, 20120101110031). The authors thank the Innovation Platform for Micro/Nano Device and System Integration and Cyrus Tang Centre for Sensor Materials and Applications at Zhejiang University.
dc.languageEnglishen
dc.language.isoenen
dc.publisherNPG
dc.rightsAttribution 2.0 UK: England & Wales*
dc.rights.urihttp://creativecommons.org/licenses/by/2.0/uk/*
dc.titleFilm bulk acoustic resonators integrated on arbitrary substrates using a polymer support layeren
dc.typeArticle
dc.description.versionThis is the final version of the article. It first appeared from NPG via http://dx.doi.org/10.1038/srep09510en
prism.number9510en
prism.publicationDate2015en
prism.publicationNameScientific Reportsen
prism.volume5en
dcterms.dateAccepted2015-03-05en
rioxxterms.versionofrecord10.1038/srep09510en
rioxxterms.licenseref.urihttp://www.rioxx.net/licenses/all-rights-reserveden
rioxxterms.licenseref.startdate2015-03-31en
dc.contributor.orcidFlewitt, Andrew [0000-0003-4204-4960]
dc.identifier.eissn2045-2322
rioxxterms.typeJournal Article/Reviewen


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Attribution 2.0 UK: England & Wales
Except where otherwise noted, this item's licence is described as Attribution 2.0 UK: England & Wales