Controlling Catalyst Bulk Reservoir Effects for Monolayer Hexagonal Boron Nitride CVD
Bayer, Bernhard C
Meyer, Jannik C
American Chemical Society
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Caneva, S., Weatherup, R., Bayer, B. C., Blume, R., Cabrero-Vilatela, A., Braeuninger-Weimer, P., Martin, M., et al. (2016). Controlling Catalyst Bulk Reservoir Effects for Monolayer Hexagonal Boron Nitride CVD. Nano Letters, 16 1250-1261. https://doi.org/10.1021/acs.nanolett.5b04586
Highly controlled Fe-catalyzed growth of monolayer hexagonal boron nitride (h-BN) films is demonstrated by the dissolution of nitrogen into the catalyst bulk via NH3 exposure prior to the actual growth step. This “pre-filling” of the catalyst bulk reservoir allows us to control and limit the uptake of B and N species during borazine exposure and thereby to control the incubation time and h-BN growth kinetics, while also limiting the contribution of uncontrolled precipitation-driven h-BN growth during cooling. Using in situ X-ray diffraction and in situ Xray photoelectron spectroscopy combined with systematic growth calibrations, we develop an understanding and framework for engineering the catalyst bulk reservoir to optimize the growth process which is also relevant to other 2D materials and their heterostructures.
hexagonal boron nitride (h-BN), chemical vapor deposition (CVD), borazine (HBNH)₃, ammonia (NH₃), iron (Fe)
S.C. and R.W. acknowledge funding from EPSRC (Doctoral training award). R.S.W. acknowledges a Research Fellowship from St. John’s College, Cambridge and a EU Marie Skłodowska-Curie Individual Fellowship (Global) under grant ARTIST (no. 656870) from the European Union’s Horizon 2020 research and innovation programme. B.C.B. acknowledges funding from the European Union’s Horizon 2020 research and innovation programme under the Marie Skłodowska-Curie grant agreement No 656214 - 2DInterFOX. B.C.B and J.C.M. acknowledge support from the Austrian Science Fund (FWF): P25721-N20 and the Austrian Research Promotion Agency (FFG): 848152 - GraphenMoFET. A.C.-V. acknowledges the Conacyt Cambridge Scholarship and Roberto Rocca Fellowship. S.H. acknowledges funding from ERC grant InsituNANO (no. 279342). We acknowledge the European Synchrotron Radiation Facility (ESRF) for provision of synchrotron radiation facilities at the BM20/ROBL beamline. We acknowledge the Helmholtz-Zentrum-Berlin Electron storage ring BESSY II for provision of synchrotron radiation at the ISISS beamline. We thank the ESRF and BESSY staff for continued support of our experiments and valuable discussion.
European Research Council (279342)
European Commission Horizon 2020 (H2020) Marie Sk?odowska-Curie actions (656870)
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External DOI: https://doi.org/10.1021/acs.nanolett.5b04586
This record's URL: https://www.repository.cam.ac.uk/handle/1810/253266
Attribution 2.0 UK: England & Wales
Licence URL: http://creativecommons.org/licenses/by/2.0/uk/