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Sensitive Electronic-Skin Strain Sensor Array Based on the Patterned Two-Dimensional α-In2Se3

Accepted version
Peer-reviewed

Type

Article

Change log

Authors

Feng, W 
Zheng, W 
Gao, F 
Chen, X 
Liu, G 

Abstract

Two-dimensional (2D) layered semiconductors have emerged as a highly attractive class of materials for flexible and wearable strain sensor-centric devices such as electronic-skin (e-skin). This is primarily due to their dimensionality, excellent mechanical flexibility, and unique electronic properties. However, the lack of effective and low-cost methods for wafer-scale fabrication of these materials for strain sensor arrays limits their potential for such applications. Here, we report growth of large-scale 2D In2Se3 nanosheets by templated chemical vapor deposition (CVD) method, using In2O3 and Se powders as precursors. The strain sensors fabricated from the as-grown 2D In2Se3 films show 2 orders of magnitude higher sensitivity (gauge factor ~237 in −0.39% to 0.39% uniaxial strain range along the device channel length) than what has been demonstrated from conventional metal-based (gauge factor: ~1−5) and graphene-based strain sensors (gauge factor: ~2−4) in a similar uniaxial strain range. The integrated strain sensor array, fabricated from the template-grown 2D In2Se3 films, exhibits a high spatial resolution of ~500 μm in strain distribution. Our results demonstrate the applicability and highly attractive properties of 2D layered semiconductors in e-skins for robotics and human body motion monitoring.

Description

Keywords

40 Engineering, 4016 Materials Engineering, 4009 Electronics, Sensors and Digital Hardware

Journal Title

Chemistry of Materials

Conference Name

Journal ISSN

0897-4756
1520-5002

Volume Title

Publisher

American Chemical Society (ACS)
Sponsorship
National Natural Science Foundation of China (Grant ID: 61390502)